Equipment Register

NODETYPEDESCRIPTIONLOCATION (IF APPLICABLE)Person to Contact for accessEmail for access
The Australian National UniversityDevice Testing and PackagingBlackbody source for MIR photodetector characterisaionResearch School of PhysicsLan Fulan.fu@anu.edu.au
The Australian National UniversityDevice Testing and PackagingLaser diode test bench, inclduing laser diode scriberResearch School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityDevice Testing and PackagingQuantum efficiency measurement systemResearch School of PhysicsLan Fulan.fu@anu.edu.au
The Australian National UniversityDevice Testing and PackagingSolar simulatorResearch School of PhysicsLan Fulan.fu@anu.edu.au
The Australian National UniversityDevice Testing and PackagingWire bonders and flip chip bonderAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials CharacterisationAtomic force microscope (AFM)Australian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials CharacterisationHall effect, deep level transient spectroscopy (DLTS), I-V, C-V, four-point probeResearch School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials CharacterisationHi-resolution x-ray diffraction (XRD)Research School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials CharacterisationPhotoelectrochemical setupResearch School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials CharacterisationRutherford backscattering spectrometry (RBS) & elastic recoil detection analysis (ERDA)Research School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials CharacterisationScanning electron microscope (SEM) with chatodoluminescence (CL)Australian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials CharacterisationScanning electron microscopes (SEM) and transmission electron microscope (TEM)Centre for Advanced MicroscopyHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials CharacterisationSurface profilometers - opticalResearch School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials CharacterisationSurface profilometers - stylusAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials ProcessingLow and high energy ion implanters (several keVs to several MeVs)Research School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials ProcessingNanoindentersResearch School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials ProcessingPrecision ion polishing system (PIPS), ion beam millerResearch School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsDC/RF magnetron suptteringAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsDual frequency plasma enhanced chemical vapour deposition (PECVD)Australian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsMetal Organic Chemical Vapour Deposition for III-As, P, Sb, N materials, including nanowires, quantum dots and hBNAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsPulsed laser deposition for oxide-based materialsResearch School of ChemistryHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsThermal and plasma-assisted atomic layer depositionAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMicrofabrication and Device TechnologiesBarrel etcherAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMicrofabrication and Device TechnologiesChemical-mechanical polishingAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMicrofabrication and Device TechnologiesElectron Beam evaporatorAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMicrofabrication and Device TechnologiesHot embosserAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMicrofabrication and Device TechnologiesInductively-coupled plasma reactive ion etching (ICP-RIE)Australian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMicrofabrication and Device TechnologiesMask aligners for photolithographyAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMicrofabrication and Device TechnologiesRapid thermal processors, furnacesAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityMicrofabrication and Device TechnologiesThermal evaporatorAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityNanofabrication: Two-DimensionalDual beam focused ion beam (FIB)Australian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityNanofabrication: Two-DimensionalElectron beam lithography (EBL)Australian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityNanofabrication: Two-DimensionalGeneral optical microscope with transfer stage for 2D material dry transfer.Research School of PhysicsDragomirdragomir.neshev@anu.edu.au
The Australian National UniversityNanofabrication: Two-DimensionalNano-imprint lithography (NIL)Australian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityOptical CharacterisationConfocal, SNOM, AFM, Second harmonic microscopeResearch School of PhysicsDragomirdragomir.neshev@anu.edu.au
The Australian National UniversityOptical CharacterisationEntangle photon tomography (900-1600 nm)Research School of PhysicsDragomirdragomir.neshev@anu.edu.au
The Australian National UniversityOptical CharacterisationFour transform infrared spectrometer (FTIR) with IR microscopeResearch School of PhysicsLan Fulan.fu@anu.edu.au
The Australian National UniversityOptical CharacterisationFTIR microspectrometer, Hyperion 2000Research School of PhysicsLan Fulan.fu@anu.edu.au
The Australian National UniversityOptical CharacterisationMicro polarisation characterisationResearch School of PhysicsDragomirdragomir.neshev@anu.edu.au
The Australian National UniversityOptical CharacterisationMicro Transmission / Reflection spectroscopyResearch School of PhysicsDragomirdragomir.neshev@anu.edu.au
The Australian National UniversityOptical CharacterisationMicro-Raman, micro-photoluminescenceResearch School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityOptical CharacterisationReflectivity, transmissivity, photoluminescence excitation (PLE)Research School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityOptical CharacterisationSpectroscopic ellipsometerAustralian National Fabrication Facility, ACT NodeHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityOptical CharacterisationTime-resovled photoluminescence, micro-photoluminescence (low temperature)Research School of PhysicsHoe TanHoe.Tan@anu.edu.au
The Australian National UniversityOptical CharacterisationUltrafast laser system, Chameleon Ultra II with OPO (680-1700 nm)Research School of PhysicsDragomirdragomir.neshev@anu.edu.au
The University of MelbourneOptical CharacterisationOptical custom benchtop microscope (VIS)School of PhysicsAnn Robertsann.roberts@unimelb.edu.au
The University of MelbourneOptical CharacterisationSpatial light modulatorSchool of PhysicsAnn Robertsann.roberts@unimelb.edu.au
The University of MelbourneOptical CharacterisationSupercontinuum laserSchool of PhysicsAnn Robertsann.roberts@unimelb.edu.au
The University of MelbourneOptical CharacterisationTunable spectral filter (Bandwidth >5 nm)School of PhysicsAnn Robertsann.roberts@unimelb.edu.au
The University of MelbourneOptical CharacterisationUpright and inverted microscopes including extensive polarisation analysis componentsSchool of PhysicsAnn Robertsann.roberts@unimelb.edu.au
The University of MelbourneOptical CharacterisationCustom tabletop spectral characterisation set-up (VIS)School of PhysicsKen Crozierkenneth.crozier@unimelb.edu.au
The University of MelbourneOptical CharacterisationEQE testing set-up (Energetiq LDLS, monochromator, custom microscope)School of PhysicsKen Crozierkenneth.crozier@unimelb.edu.au
The University of MelbourneOptical CharacterisationFTIR microspectrometer (Perkin Elmer), Janis cryostat, infrared lasers (2.2, 4.5, 8.35 um)School of PhysicsKen Crozierkenneth.crozier@unimelb.edu.au
The University of MelbourneOptical CharacterisationOptical trapping microscopeSchool of PhysicsKen Crozierkenneth.crozier@unimelb.edu.au
The University of MelbourneOptical CharacterisationProbe station (Evergreen) and source measure units (Keithley)School of PhysicsKen Crozierkenneth.crozier@unimelb.edu.au
RMIT UniversityDevice Testing and PackagingDirect circuit printersMiniaturised Functional Devices LaboratorySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityDevice Testing and PackagingElectronic and optoelectronic characterisation test stationsMiniaturised Functional Devices LaboratorySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityDevice Testing and PackagingElectronic packaging and interfacingMiniaturised Functional Devices LaboratorySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityDevice Testing and PackagingEnvironmental stages (electrical, thermal, cryogenic, and gaseous environments)Miniaturised Functional Devices LaboratorySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityDevice Testing and PackagingLarge-area screen printerMiniaturised Functional Devices LaboratorySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityDevice Testing and PackagingMicro- and nano-electronic probe stationsMiniaturised Functional Devices LaboratorySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityDevice Testing and PackagingSemiconductor parametric analysersMiniaturised Functional Devices LaboratorySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationAtomic force microscope (thin film materials, multimodal capabilities)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationAtomic force microscopes (biomaterials and liquid media)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationCryostat (continuous flow)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationFour point probeMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationGas sensing laboratoriesMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationHigh-precision nanoindenterRMIT Microscopy and Microanalysis FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationLaser Doppler vibrometersMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationPhotoluminescence and micro-Raman spectrometerMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationScanning electron microscopes (SEM)RMIT Microscopy and Microanalysis FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationSpectroscopic ellipsometerMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationSuper-resolution fluorescence microscopyMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationSurface profilometers: stylus and opticalMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationUltraviolet photoelectron spectroscopy (UPS)RMIT Microscopy and Microanalysis FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationX-ray diffraction (high-resolution analysis)RMIT X-Ray FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationX-ray diffraction (rapid analysis)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials CharacterisationX-ray photoelectron spectroscopy (XPS)RMIT Microscopy and Microanalysis FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingBiomaterials functionalisation and bioplotterMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingDeep reactive ion etching (DRIE): Silicon Bosch processMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingFocussed ion beam system: GaRMIT Microscopy and Microanalysis FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingGlove boxes for nanomaterials processingMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingHigh-temperature annealing furnaces: Contact annealingMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingHigh-temperature annealing furnaces: Silicon dopingMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingHigh-temperature annealing furnaces: Silicon oxidationMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingHigh-temperature annealing furnaces: Titanium in-diffusion in lithium niobateMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingInductively-coupled plasma deep reactive ion etching (ICP-RIE)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingLaser machining systemMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingPhysical containment Level 2 (PC2) facility for bacterial cell handlingSir Ian Potter NanoBioSensing FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingPhysical containment Level 2 (PC2) facility for mammalian cell handlingMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials ProcessingVacuum and low pressure annealing furnacesMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsLow pressure chemical vapour deposition (LPCVD)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsMagnetron sputtering systems (DC, pulsed DC, and RF)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsPlasma-enhanced atomic layer deposition (ALD)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsPlasma-enhanced chemical vapour deposition (PECVD)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsSilanisationMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsThermal evaporatorMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMaterials Synthesis: Thin Films and Two-Dimensional MaterialsVapour deposition systems (chemical and physio-chemical)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMicrofabrication and Device TechnologiesCyclic olefin copolymer (COC) processingMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMicrofabrication and Device TechnologiesMicrofluidic device fabricationMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMicrofabrication and Device TechnologiesPhotolithography: Mask aligners with backside alignment and nanoimprint lithographyMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMicrofabrication and Device TechnologiesPhotolithography: Maskless aligner (MLA)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMicrofabrication and Device TechnologiesPhotolithography: Training and demonstration stationsMicro Nano Teaching FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMicrofabrication and Device TechnologiesPolydimethyl siloxane (PDMS) processingMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMicrofabrication and Device TechnologiesWafer bonderMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityMicrofabrication and Device TechnologiesWet chemical processing for etching, surface treatment, and electroplatingMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityNanofabrication: Three-DimensionalFocussed ion beam system: He, Ne, and GaMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityNanofabrication: Three-DimensionalMetal and polymer 3D printing: additive and subtractiveAdvanced Manufacturing PrecinctSharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityNanofabrication: Three-DimensionalNanoscale additive manufacturing systemLaboratory of Artificial Intelligence NanophotonicsSharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityNanofabrication: Three-DimensionalNanoscale subtractive manufacturing systemLaboratory of Artificial Intelligence NanophotonicsSharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityNanofabrication: Three-DimensionalNanoscribe 3D printerMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityNanofabrication: Three-DimensionalTransmission electron microscopes (TEM)RMIT Microscopy and Microanalysis FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityNanofabrication: Two-DimensionalElectron beam lithography (EBL)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityNanofabrication: Two-DimensionalNano-imprint lithography (NIL)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityOptical CharacterisationMicrophotospectrometerMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityOptical CharacterisationNanoscale imaging systemLaboratory of Artificial Intelligence NanophotonicsSharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityOptical CharacterisationScanning near-field optical microscope (SNOM)Micro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityOptical CharacterisationTerahertz time domain spectrometerMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityStretchable and Wearable DevicesIntegration of miniature wireless electronicsMiniaturised Functional Devices LaboratorySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityStretchable and Wearable DevicesSoft electronics fabricationMicro Nano Research FacilitySharath Sriramsharath.sriram@rmit.edu.au
RMIT UniversityStretchable and Wearable DevicesSoft electronics testing stationMiniaturised Functional Devices LaboratorySharath Sriramsharath.sriram@rmit.edu.au
University of Technology SydneyElectrical characterisationHall System (LN) FEITFrancesca IacopiFrancesca.Iacopi@uts.edu.au
University of Technology SydneyElectrical characterisationProbe Station (4 probes) + Parametric AnalyserFEITFrancesca IacopiFrancesca.Iacopi@uts.edu.au
University of Technology SydneyMaterials SynthesisNanoSputtererFEITFrancesca IacopiFrancesca.Iacopi@uts.edu.au
University of Technology SydneyOptical CharacterisationConfocal Raman spectroscopyFEITFrancesca IacopiFrancesca.Iacopi@uts.edu.au
University of Technology SydneyOptical CharacterisationFT IR microscopeFEITFrancesca IacopiFrancesca.Iacopi@uts.edu.au
University of Technology SydneyOptical Characterisationa diffuse reflectance FTIR system with environmental chamber called “Praying Mantis” from ThermoFisher. to study surface-enhanced infrared absorption (SEIRA) for chemical sensing using plasmonics/metasurfaces.FEITFrancesca IacopiFrancesca.Iacopi@uts.edu.au
University of Technology SydneyMaterials CharacterisationScannig probe microscopyScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyMaterials ProcessingBeam-directed surface functionalizationScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyMaterials ProcessingDirect-write electron & ion beam-induced etchingScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyMaterials ProcessingOptical and electron beam lithographyScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyMaterials ProcessingReactive ion etchingScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyMaterials SynthesisHT Tube FurnaceScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyMaterials Synthesis: NanostructuresDirect-write electron/ion beam-directed growth of nanostructesScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyMaterials Synthesis: NanostructuresGrowth of diamondScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyMaterials Synthesis: Thin Films and Two-Dimensional MaterialsGrowth and wet/dry trasfer of 2D materialsScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyMicrofabrication and Device TechnologiesDevice fabrication from 2D and 3D materialsScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyOptical CharacterisationConfocal photoluminescence spectroscopy (room temperature, high temperature, cryogenic, controlled gaseous environments)ScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyOptical CharacterisationODMRScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
University of Technology SydneyOptical CharacterisationPhoton correlation analysis; characterisation of single photon emittersScienceIgor Aharonovich or Milos Tothigor.aharonovich@uts.edu.au; milos.toth@uts.edu.au
The University of Western Australia15 Tesla superconducting cryogenic magnet systemMeasures the carrier concentration and mobility of semiconductor samples at various temperatures using the Hall EffectAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western Australia4Wave LANS DC Sputter CoaterProvides atomically engineered thin films and interfaces. The tool can vary process pressures, adatom energies, and provides good uniformity and repeatability.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaAnealsys AS-One 150 RTAA cold wall bench top rapid thermal processor, to provide high cooling rates and low memory effect of the process chamber.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaCustom DLTS SystemCharacterisation of semiconductor bandgap energy levels using deep-level transient spectroscopy (DLTS)Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaCustom Dual Chamber Thermal EvaporatorCustom made dual chamber thermal evaporator for deposition of metal and non-metal materials with high deposition rate and high purity.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaCustom Indium Thermal EvaporatorThermal evaporator designed for Indium deposition (In dedicated)Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaCustom infrared/visible spectroscopy systemProvides 2-D surface mapping of infrared transmission of thin film filters. Also used for light beam induced current measurements on semiconductor samples.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaCustom IR characterisation systemIR transmission/reflection system to characterise spectrometer/filter performanceAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaCustom Zinc Sulfide Thermal EvaporatorThermal evaporator designed for Zinc Sulfide depositionAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaDisco DAD 3240Dices semiconductor sample wafersAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaEdwards Auto 500 E-beam EvaporatorAbility to deposit ultra pure films of materials with high melting points and other materials that are difficult to deposit by resistance thermal evaporation. The tool allows thick film deposition and also multiple coatings.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaEVG 105 Bake ModuleSoftbake, post-exposure bake and hardbake processes. Programmable proximity pins and nitrogen overflow provide control of resist hardening processes and temperature profiles.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaF&S Bondtec ball bonderSemi-automated gold wire bonding stationAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaFinetech Fineplacer-96 flip-chip bonderManual flip-chip bonder with high accuracy of 0.5 μm.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaGooch and Housego OL 750 Spectroradiometric Measurement SystemMeasures the electrical output per optical input of photodetectors.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaHeidelberg MLA150 maskless alignerDirect writing of structures down to 0.6 µm in photoresist coated substrates.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaKeithley 4200A-SCS parameter analyzerAll-in-one unit, that consists of power supplies, voltage meters, current meters, switching matrices and LCR meters to test semiconductors devicesAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaLabec HTF 60 annealing furnaceAnneals semiconductor samples at high temperaturesAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaMarch Instruments PM-600 barrel plasma asherOxygen plasma etcher/asher.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaOlympus LEXT OLS5000 3D MicroscopeProvides sub-micron 3D observation/measurement of surface topography with the ability to compare very rough surface shapes.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaOptronic Laboratories Inc. OL 480 Blackbody SourceEmits blackbody radiation for characterizing responsitivity of photodetectorsAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaOxford Instruments Plasmalab100 ICPRIEInductively coupled plasma reactive ion etcherAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaOxford Instruments Plasmalab80 plus ICPCVDThin film deposition via Incuctively Coupled Plasma Enhanced Chemical Vapour Deposition (ICPCVD)Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaPerkin Elmer Spotlight 200i Fourier trnasform infrared spectroscopy (FTIR) microscopeIR transmission/reflection system to characterise spectrometer/filter performanceAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaPolytec OFV-500 VibrometerNon-contact vibration analysis commonly used to characterise MEMS devices. Wide selection of high-performance vibration displacement, acceleration and vibrational velocity decoders that cover the frequency range from DC to 24 MHz, vibrational velocities up to ±25 m/s and displacement resolutions down to 0.1 pmAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaPowatec U-200 UV curing systemPerforms UV curing of samplesAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaPulse Instruments 7700Characterizes the imaging performance of infrared arraysAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaRiber 32P Molecular Beam Epitaxy SystemVersatile tool that epitaxially deposits precise amounts of material onto substrates. Often used to design and create semiconductor structures for manufacturing many novel devices.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaRucker & Kolls 680A ProberProbe station with B&L MicrozoomAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaScientific Vacuum Systems V6000 E-beam EvaporatorAbility to deposit ultra pure films of materials with high melting points and other materials that are difficult to deposit by resistance thermal evaporation. The tool allows thick film deposition and also multiple coatings.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaSentech SI 500D ICPCVDThin film deposition via Incuctively Coupled Plasma Enhanced Chemical Vapour Deposition (ICPCVD). Variable plasma properties providing high density, low ion energy, and low pressure plasma deposition of dielectric films. A large variety of substrates from wafers up to 200 mm diameter to parts loaded on carriers can be processed.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaSuss MicroTek MA6 mask alignerContact mask aligner system to perform precision mask-to-wafer front- or back-side alignmentAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaUniTemp RVS-210 Indium reflow systemUsed to reflow Indium bumps into balls for flip-chip bondingAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaVeeco Dektak 150 stylus profilerMeasures thin film thickness, stress, surface roughness and formAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaVermes MDC 3200+ microdispenserDispenses droplets of a wide variety of fluids with a diameter of less than 150 micrometers on substratesAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaWollam M-2000 ellipsometerMeasure film thickness, optical constants, characterize composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in optical responseAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaZygo NewView6300Non-contact 3D scanning white light and optical phase-shifting interferometer. Featured modes: Microscope, Films, Stitch and Dynamic MEMS.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaTousimis critical point dryerAutomatic supercritical point dryerAustralian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au
The University of Western AustraliaFilmetrics F10-RT thin film analyserSimultaneous reflectance/transmittance measurement for characterisation of thin film thickness and refractive index.Australian National Fabrication Facility, WA NodeMariusz Martyniukmariusz.martyniuk@uwa.edu.au